Advanced Vacuum’s APEX SLR provides etching capabilities over a variety of materials and substrates. The small footprint, low cost, ease of use and superior performance makes the Apex SLR ideal for a wide range of uniform, high quality ICP etch applications serving R&D, FA, prototyping, pilot line and low volume production. The Apex SLR is ideal for numerous technologies such as Failure/Yield Analysis, Photonics, Solid State Lighting, MEMs, and Wireless ICP etch processing.

The Apex SLR is a continuation of Plasma-Therm’s highly regarded Shuttlelock® system in a compact, robust and easily maintained form factor.

Advanced Vacuum, a Plasma-Therm company, is the manufacturer of the Vision 300 and 400 (formerly Plasma-Therm 790+) series open-load etch and deposition systems.

The Apex SLR provides technology for etch using a high density ICP source with a RF biased lower electrode:

Apex SLR ICP (Inductively Coupled Plasma)

Handling

The ICP system utilizes a load lock with manual loading

Productivity Enhancements

• • Process Library: The Apex SLR system uses well-established reactor technology that provides reliable performance and is supported with guidance from a continuously evolving process library.
  • Endpoint: Both laser and optical emission spectroscopy endpoint technologies are available on Apex SLR to augment processing capability.
  • Data Logging: Simplified data collection for sharing of process monitoring and recipe information.