The new generation of ORBIS platforms enable the most advanced processing capability from research, to commercial R&D through to high-volume manufacturing. The ORBIS platform approach delivers many benefits to our customers, such as:

• Upgrade paths from R&D through to full-scale production
• Cost-effective solutions—lab or fab
• Seamless process transfer—from lab to fab
• Low cost of ownership
• End point detection
• Single wafer processing